Wavelength- and Bandwidth-Tunable Filters Based on MEMS-actuated Microdisk Resonators λ1 Input Port Through Port
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چکیده
A wavelengthand bandwidthtunable filter with microelectromechanical-system (MEMS)actuated waveguides is first demonstrated on a silicon-based microdisk resonator. Integrated microheaters enabled wavelength tuning up to 125GHz. Bandwidth can be tuned from 12.0 to 41.2GHz by coupling control. © 2005 Optical Society of America OCIS codes: (130.3120) Integrated optics devices; (140.4780) Optical resonators; (120.2440) filters
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تاریخ انتشار 2005